AC 50 KHZ GENERATOR

AC Plasma source mod. GGK-LF 500

This is an AC source with 50Khz frequency for plasma applications, at low cost and very compact. The system supplied includes the adapting transformer with 3 user-selectable intermediate sockets and a complete measurement circuitry.
The power supply is available in two versions, the first with display and integrated control unit, the second version is in the black box version ideal for those who want to control the power supply via PC or PLC, for this version the GGK LF/RF remote controller is also diponibile.
The system provides 500 watts@50 Khz, and impedance matching from 150 to 2500ohm is possible by selecting one of 3 possible configurations for the output transformer.

Typical applications:

Glow discharge, (replacing the conventional ones in DC systems).
PECVD deposition processes.
Power supplying for small Sputtering cathodes.
BIAS source in ICP systems.
Cleaning and activation in plasma processes.

In several applications, this generator constitutes an alternative to RF systems, with markedly lower costs and with less setting up problems. The command and control take place through a complete and flexible analog user port.

Performance and benefits:

Extremely compact : 345Px160Lx120A mm weight Kg 4.
Direct connection to the electrode, no impedance matching devices are necessary.
delivery of the rated power (500 watts) is guaranteed in an impedance range of 2:1 without intervening on the transformer sockets.
Measuring system of electrical parameters of the integrated plasma: re-transmissions of Vrms, Dcbias, active power.
Possibility of carrying out the adjustment in RMS power or voltage.
Wide impedance range, adaptable loads from 250 to 1500 ohms.
The problems of arching, typical of DC have been done away with.
High conversion performance of > 90%, doesn’t need forced cooling
Active arc detector circuit, instantaneous quenching of arcs.

Electrical specifications

230V single-phase power supply at 4Amp, maximum absorption 550 Watt
Analog user port, signals scaling 0-10V, 24V controls, direct interfacing with PLC
Molex HV output connector, provided with connection cable to the electrode.
Reading precision: Voltage 5%, power 7%, DC bias 5%.
Protections from: over-current, arcs, over-temperature, power limitation.

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GAMBETTI KENOLOGIA SRL

Via A.Volta, 27 | 20082 Binasco Telefono + 39 02 90093082 – Fax + 39 02 9052778 P. IVA IT08000120157

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