GGK-RF15 Plasma Generator: Power and Reliability

RF 13. 56 MHZ POWER SUPPLY

GGK-RF15 RF Generator 200Wat@13.56Mhz.
Generator for plasma applications at ISM frequency 13.56 MHz, power range from 0 to 200 watts. The GGK-RF15 model is the most compact and reliable generator on the market in its range; it is offered at a very attractive price. The processes for which the system can be used include:

Plasma-based treatments for surface changes, activations and pre-cleaning
Power supplying of small sputtering cathodes
Deposition processes, assisted by PECVD plasma
Reactive ION etching processes. The RF15 generator was designed for deployment in small plasma system treatments and, given its extremely compact dimensions, can be mounted directly on-board chamber.

The high degree of reliability and compactness is assured through the selection of latest generation components carried out at the designing stage. The resulting apparatus is made up by a limited number of parts and it is almost totally without internal cabling.

Technical Specifications

Compact dimensions: 220 x 180 x 80 mm, weight 2.5 Kg.: this is the smallest and lightest unit available on the market
New design and new set of components: in the critical circuit functions it uses a top-speed driver for high current and a final stage in the high-efficiency class E.
Power modulation and control take place through a PWM controller, so as to maintain maximum efficiency along the whole useful power range.
High flexibility: Gambetti Kenologia is available for customisations such as non-standard scaling on the IO signals, frequencies differing from 13.56 Mhz, etc.

General Specifications

Power supply: Universal, 95 – 240V through power supply SWS300-48 included in the supply, or 55V DC from external source.
Frequency: 13.56 Mhz, quartz-stabilised (other frequencies on request).
High efficiency of the final stage, minimum 85%.
Complete protection system: high VSWR, PA over-current, FET drain over-voltage in output, over-temperature.
Maximum reflected power: 40 Watt.
Possibility of fault-free connection under any load, from open to short-circuit
Complete with measuring bridge for direct and reflected power on a linear scale, precision 5% end of scale.
Simple and comprehensive user interface consisting of a 15-pin D-type connector. The analog signals are scaled to 10 V, and the discrete control signals comply with the PLC standard at a nominal 24 V.
Adjustment: on direct power, precision improved by 5% to end of scale, 50ohm, female BNC output connector.
Forced cooling via a 50-mm fan. The fan operates only when RF power is required. This measure extends the fan’s service life.
Ambient temperature in operation: from 0 to 40 degrees.

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GAMBETTI KENOLOGIA SRL

Via A.Volta, 27 | 20082 Binasco Telefono + 39 02 90093082 – Fax + 39 02 9052778 P. IVA IT08000120157

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