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PRODUCTS

Small Bench-top Plasma System – Colibrì

Proudly made in Italy

 

 

 

Colibrì is a bench-top plasma system, designed for surface cleaning, modification and activation. It can operate on different materials such as metals, plastic, ceramic, paper and others.
Colibrì consists in a plasma reactor capacitively coupled that comprises a cylindrical process chamber with a couple of planar and parallel electrodes inside, entirely made of aluminum and free of welds. The top electrode is RF biased while the lower electrode is grounded. Thanks to a suitable sample tray, the samples to be processed are manually loaded inside the process chamber
The user friendly control interface makes the Colibrì an easy and versatile solution for small productions or R&D environments.

Principle of operation

Colibrì is fully automated by a microcontroller . The only manual handling to be carried out is the step of loading / unloading of the samples. With this system it is possible to perform treatments simply by executing one of the recipes editable by the user.
One process gas is introduced into the process chamber by using a manual valve. An LF signal (50 kHz) is led to the electrodes within the chamber; interacting with the gas molecules, this signal, produces the plasma.
The generated plasma provides reactive ionic species that act on the first monolayer of the substrate surface to be treated. The resulting process can be changed by the parameters that affect the state of plasma (gas flows and signal strength).

Applications

  • Surface activation
  • Surface cleaning
  • Surface coating
  • Etching
  • Plasma Ashing

 

 Product features

      Bench-top plasma system , easy and versatile
      Able to process up to nine different editable recipes
      Uniformity for Consistent Results
      Long Term Reliability
      Primary brands components used

 

 Specifiche Tecniche
 Dimensions  W x L x H – Footprint  450 x 370 x 180 mm
 Net Weight  16 Kg
 Clearances  Right, Left, Front – 600 mm, Back – 300 mm
 Chamber  Material  Aluminum
 Max Volume  2 lt. (128,6 in³) - Ø 102 mm L 256 mm
 Electrode
 Electrode Configuration  Plane and parallel With dark shield
 Active work area/Sample tray  83 mm x 250 mm
 Electrode gap  34 mm
 Material  Alluminio
 RF Signal  Maw  output Power  200W
 Frequency  50 kHz
 Process Gases  Manual valve
 Stainless steel flow micro-regulator
 Max gases number  1
 Control Interface  Control  Microcontroller
 User Interface  Display and panel keyboard
 Facility Service  Power supply  Single phase + Earth 220/240 VAC, 8 Amax 50/60 Hz, 13 AWG
Single phase + Earth 110/120 VAC, 16 Amax, 50/60 Hz, 10 AWG
 Process Gas inlets, type and dimensions  6 mm OD, Compression Fittings
 Process gas pressure  From 0.8 bar min. to 1 bar max., regulated
 Purge Gas inlets, type and dimensions  6 mm OD, Compression Fittings
 Suggested  Purge Gas  N2, Air
 Purge Gas Pressure  From 0.8 bar min. to 1 bar max., regulated
 Exhaust  NW16 ISO-KF
 Compliance  International  CE Marked

Scientific Publications

Consult the scientific articles published by using our plasma reactors