PRODUCTS

Small Bench-top Plasma System – Colibrì

 

 

 

Colibrì is a bench-top plasma system, designed for surface cleaning, modification and activation. It can operate on different materials such as metals, plastic, ceramic, paper and others.
Colibrì consists in a plasma reactor capacitively coupled that comprises a cylindrical process chamber with a couple of planar and parallel electrodes inside, entirely made of aluminum and free of welds. The top electrode is RF biased while the lower electrode is grounded. Thanks to a suitable sample tray, the samples to be processed are manually loaded inside the process chamber
The user friendly control interface makes the Colibrì an easy and versatile solution for small productions or R&D environments.

Principle of operation

Colibrì is fully automated by a microcontroller . The only manual handling to be carried out is the step of loading / unloading of the samples. With this system it is possible to perform treatments simply by executing one of the recipes editable by the user.
One process gas is introduced into the process chamber by using a manual valve. An LF signal (50 kHz) is led to the electrodes within the chamber; interacting with the gas molecules, this signal, produces the plasma.
The generated plasma provides reactive ionic species that act on the first monolayer of the substrate surface to be treated. The resulting process can be changed by the parameters that affect the state of plasma (gas flows and signal strength).

Applications

• Surface activation
• Surface cleaning
• Surface coating
• Etching
• Plasma Ashing

 

Product features
●  Bench-top plasma system , easy and versatile ●  Able to process up to nine different editable recipes ●  Uniformity for Consistent Results ●  Long Term Reliability ●  Primary brands components used

 

Specifiche Tecniche
Dimensions	W x L x H – Footprint	436 x 464 x 240 mm
	Net Weight	20 Kg
	Clearances	Right, Left, Front – 600 mm, Back – 300 mm
Chamber	Material	Aluminum
	Max Volume	2 lt. (128,6 in³) - Ø 102 mm L 256 mm
Electrode	Electrode Configuration	Plane and parallel With dark shield
	Active work area/Sample tray	83 mm x 250 mm
	Electrode gap	34 mm
	Material	Alluminio
RF Signal	Maw  output Power	200W
	Frequency	50 kHz
Process Gases	Manual valve	Stainless steel flow micro-regulator
	Max gases number	1
Control Interface	Control	Microcontroller
	User Interface	Display and panel keyboard
Facility Service	Power supply	Single phase + Earth 220/240 VAC, 8 Amax 50/60 Hz, 13 AWG Single phase + Earth 110/120 VAC, 16 Amax, 50/60 Hz, 10 AWG
	Process Gas inlets, type and dimensions	6 mm OD, Compression Fittings
	Process gas pressure	From 0.8 bar min. to 1 bar max., regulated
	Purge Gas inlets, type and dimensions	6 mm OD, Compression Fittings
	Suggested  Purge Gas	N2, Air
	Purge Gas Pressure	From 0.8 bar min. to 1 bar max., regulated
	Exhaust	NW16 ISO-KF
Compliance	International	CE Marked

Scientific Publications

Consult the scientific articles published by using our plasma reactors