TABLE-TOP PLASMA SYSTEM
Tucano represents a vacuum plasma device in tabletop design, capacitive and RF-powered 200W at 13.56MHz. Characterised by its ease of use and simplicity, it is designed for those who need to perform cleaning, modification or activation operations on surfaces of various materials such as metals, plastics, ceramics or paper, as well as for photoresist removal.
It proves to be an ideal option for both clean room R&D and small-scale production.
Attivazione superficiale e idrofilizzazione di microcanali in PDMS e polimeri tecnici, plasma bonding vetro-polimero e polimero-polimero, funzionalizzazione chimica per biosensori e immobilizzazione biomolecolare, deposizione di coating anti-fouling e biocompatibili, pulizia atomica e decontaminazione di dispositivi microfluidici.
Attivazione superficiale per l’integrazione di biosensori e biochip, bonding wafer e sealing ermetico di cartucce diagnostiche, funzionalizzazione per l’immobilizzazione di DNA, anticorpi ed enzimi, deposizione plasma di film funzionali ed elettrodi sottili, sterilizzazione a bassa temperatura e pulizia atomica per dispositivi diagnostici miniaturizzati.
Cleaning and surface modification to obtain hydrophilic or hydrophobic surfaces, which can be used for example in the following application areas:
Cleaning and surface modifications that can be used in the following application areas, for example:
Atomic final cleaning of metal and ceramic surfaces after industrial washing to improve their paintability or for other types of coatings (e.g. PVD).
The plasma reactor is an advanced technology with applications across various sectors, from scientific research to industry. This type of reactor uses plasma—a state of matter in which gases are ionized—to generate chemical and physical reactions at low temperatures. The versatility of plasma and its distinctive properties enable it to perform a variety of functions, such as surface modification, material synthesis, decontamination, and sterilization.
A plasma reactor creates an electric field that ionizes the gas, thereby producing charged particles. These particles interact with the surfaces of materials, facilitating various types of chemical reactions. This process is particularly useful, for example, for the deposition of thin films—a key operation in sectors such as electronics, nanotechnology, and photonics—or for surface cleaning and treatment. The ability to precisely control the plasma makes plasma reactors ideal tools for targeted applications that require high performance and consistent product quality.
Plasma reactors also are used in biomedical fields. For example, they can be used for sterilization of surgical instruments, as they can eliminate bacteria and other pathogens without the use of harsh chemicals. Their effectiveness in sterilization is due to the plasma’s ability to penetrate even crevices and porosity, reaching areas that other traditional methods may not be able to treat. In addition, because the treatment takes place at low temperatures, there is no risk of damaging sensitive materials.
Again, plasma reactors are known for their ability to operate at low pressures, which also makes them particularly effective inetching materials. Thanks to their advanced technology, they are able to guarantee optimal results in terms of uniformity and adhesion, crucial aspects in industries such as consumer electronics and optical component manufacturing.
In addition to Tucano, there are several plasma reactor solutions, including. Hummingbird and Falcon RIE. With advanced features, these reactors are designed to meet the requirements of various industrial applications. All plasma reactors are equipped with advanced control systems that enable real-time monitoring and adjustment of process parameters. This feature enhances operational efficiency, enabling high-quality results, optimising processing times and reducing production costs. Their ease of use and simplified maintenance make these solutions ideal for a wide range of applications, from the aerospace sector to academic research.
So what can we expect from plasma reactors in the future? Their adoption in industry represents a step forward in technological innovation, enabling companies to remain competitive in a constantly evolving market. With increased research into nuclear fusion, plasma reactors could also play a key role in the development of new sources of clean, sustainable energy.
In conclusion, plasma reactors are a versatile and constantly evolving technology with a wide range of applications. Le soluzioni di reattori al plasma proposte da Gambetti Kenologia These are examples of how plasma technology can be used to meet modern needs, helping to improve efficiency and sustainability across various sectors.
| Technical Specifications | ||
| Dimensions | W x D x H – Footprint | 482 x 532 x 385 mm |
| Net Weight | 33 kg | |
| Clearance Distances | Rear – 300 mm | |
| Chamber | Material | Aluminum |
| Maximum Volume | 5.9 liters – Ø 153 mm W 324 mm | |
| Elettrodi | Configurazione elettrodi | Piani e paralleli + Dark Shield |
| Active work area/Tray | 118 mm x 310 mm | |
| Useful distance between electrodes | 68 mm | |
| Material | Aluminum | |
| RF Signal | Maximum power | 2 to 200 W, in 1 W increments |
| Frequency | 13.56 MHz | |
| Process gases | Available flow rates | 2–50 sccm |
| Maximum number of gases | 2 (Mass Flow Controller) | |
| Control interface | Control | PLC |
| User interface | Touchscreen display | |
| Services | Power Supply | 100–240 VAC, 5.2 A, 50/60 Hz |
| Process Gas Connection, Type and Dimensions | 6 mm OD, Compression Fittings | |
| Process Gas Pressure | 1 bar min. to 1.5 bar max. regulated | |
| Vent Gas Connection, Type and Dimensions | 6 mm OD, compression fittings | |
| Purge Recommended gases | N2, Air | |
| Purge Gas Pressure | 0.8 bar min. to 1 bar max., adjusted | |
| Exhausts | NW16 ISO-KF | |
| Compliance | International | CE Marked |
Available Vacuum Pumps
HERON 80